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Laytech`s (www.laytec.de) EpiCurve TT is applied in MOCVD systems growing multi-junction III-V solar cells on Ge, Si and GaAs substrates.
It monitors:
? layer thickness ? temperature ? surface strain ? composition
In collaboration with the Fraunhofer Institute for Solar Energy Systems (ISE), Germany, a research project has been launched to further improve the in-situ monitoring of MOVPE processes for triple-junction photovoltaic cells. The cooperation is aimed at developing monitoring sensors for industrial-scale manufacturing of triple-junction solar cells with improved process control in multi-wafer MOVPE reactors.
EpiCurve¢çTT helps to better understand the reasons for dislocations and strain within the layers, to compensate for strain-induced temperature inhomogeneities, to determine the thickness of individual thin layers and to monitor the composition of critical heterojunctions.
For datasheets, click http://www.laytec.de/fileadmin/bilder_dateien/pdf/Datasheets/Datasheet_EpiCurveTTTwo_Planetary_20081028.pdf
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